MEASURING SYSTEM FOR DETERMINING SCATTER PARAMETERS

摘要

A measuring system for determining scatter parameters of an electrical measurement object on a substrate, having a measuring machine having at least one measuring channel and at least one measuring probe electrically connected to at least one measuring channel and designed for non-contacting or contacting connection to an electrical signal line of the electrical measurement in the electronic circuit. A first positioning device is provided for at least one measuring probe, wherein at least one sensor detects a position of at least one measuring probe and outputs a position signal.