| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of reducing an effect on resolution by vibration. SOLUTION: The charged particle beam device includes: a pedestal 8: a support plate 10 supported on the pedestal 8 via a damper 7; and a supported element 30 which is supported by the support plate 10 and at least includes a charged particle gun portion 1 to generate charged particle beam and a sample holder 11 to retain a sample to irradiate the charged particle beam. In the charged particle beam device, a rotation primary center Z1 in which a vibrating body composed of the support plate 10 and the supported element 30 is below its gravity G and a rotation secondary center Z2 which is above the rotation primary center Z1. The rotation secondary center Z2 of a vibrating body 100 is housed in a region in which a sample position can be adjusted by the sample holder 11. COPYRIGHT: (C)2011,JPO&INPIT
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