发明名称 GRINDING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a device that can save a space further and grind and polish a large plate shaped material. SOLUTION: In a grinding device, a workpiece is aligned with a prescribed position in an aligning mechanism 7 before a conveying mechanism 5 having a holding surface 50a conveys the workpiece to a holding mechanism 2. The aligning mechanism 7 includes a plate member 70 having one vertical surface 700, at least three or more butting members 702 protruding from the plate member 70 and butting against an outer periphery of the workpiece along the one surface 700, a butting member moving part which allows the butting members 702 to abut on the outer periphery of the workpiece in vertical planes to move the butting members 702 so as to come close to or separate from each other and a control unit 9 for driving the butting member moving part under a state that the workpiece is held between the holding surface 50a of the conveying mechanism 5 and the one surface 700 of the plate member 70 to butt the butting members 702 against the outer periphery of the workpiece and align the workpiece. As a mechanism for aligning the vertically arranged workpiece, even when the workpiece is enlarged, the device is restrained from being enlarged. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011121130(A) 申请公布日期 2011.06.23
申请号 JP20090280334 申请日期 2009.12.10
申请人 DISCO ABRASIVE SYST LTD 发明人 YOSHIMURA HIROSHI;SUWANO JUN;FUJISAWA SHINICHI;KUBO TETSUO;NEMOTO SEIJI
分类号 B24B41/06;H01L21/304 主分类号 B24B41/06
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