发明名称 |
STAGE AND DISPENSER HAVING THE SAME |
摘要 |
PURPOSE: A stage and a dispenser having the same are provided to prevent the damage to a substrate by minimize the generation of static electricity between a stage and the substrate. CONSTITUTION: A substrate is mounted in a stage. A substrate mounting unit(120) comprises a top hole and a side hole The top hole is formed in the opposite side of the substrate. A stage base(110) receives the substrate mounting unit. A connection part(130) interlinks the top hole and the side hole. A gas suction unit is connected to the side hole and absorbs gas. |
申请公布号 |
KR20110068204(A) |
申请公布日期 |
2011.06.22 |
申请号 |
KR20090125057 |
申请日期 |
2009.12.15 |
申请人 |
TOP ENGINEERING CO., LTD. |
发明人 |
CHO, SOO HYOUNG |
分类号 |
H01L21/68;B05C11/10 |
主分类号 |
H01L21/68 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|