发明名称 STAGE AND DISPENSER HAVING THE SAME
摘要 PURPOSE: A stage and a dispenser having the same are provided to prevent the damage to a substrate by minimize the generation of static electricity between a stage and the substrate. CONSTITUTION: A substrate is mounted in a stage. A substrate mounting unit(120) comprises a top hole and a side hole The top hole is formed in the opposite side of the substrate. A stage base(110) receives the substrate mounting unit. A connection part(130) interlinks the top hole and the side hole. A gas suction unit is connected to the side hole and absorbs gas.
申请公布号 KR20110068204(A) 申请公布日期 2011.06.22
申请号 KR20090125057 申请日期 2009.12.15
申请人 TOP ENGINEERING CO., LTD. 发明人 CHO, SOO HYOUNG
分类号 H01L21/68;B05C11/10 主分类号 H01L21/68
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