METHOD OF INSPECTING A MASK AND APPARATUS FOR PERFORMING THE SAME

摘要

PURPOSE: A method of inspecting a mask and an apparatus for performing the same are provided to improve the reliability of detecting the failure of a mask by detecting a failure such as a bridge and a shift due to the obtained histogram from an image. CONSTITUTION: An image of a pattern is formed on a mask is obtained(ST210). The image is smoothened(ST220). The smoothened image is processed with binarization(ST230). A histogram is obtained according to the gray level of the image(ST240). The histogram is compared with pattern information to detect the fault of a mask(ST250).