发明名称 SILICON INGOT DRAWING DEVICE AND METHOD
摘要 <p>PURPOSE: A silicon ingot drawing device and a method thereof are provided to reduce the height of a drawing out device for a silicon ingot by forming two drawing out device for a silicon ingot. CONSTITUTION: In a silicon ingot drawing device and a method thereof, a chamber(20) receives a silicon material flowing in within a cold crucible. A gas inlet(21) and a gas outlet(22) are arranged on one side of top and bottom of the chamber. A first drawing out device solidifies a silicon solution and draws out it. A moving unit moves the first drawing out device in horizontal direction. A second first drawing out device is moved to the side of the first drawing out device and draws out the silicon ingot.</p>
申请公布号 KR20110067542(A) 申请公布日期 2011.06.22
申请号 KR20090124176 申请日期 2009.12.14
申请人 KCC CORPORATION 发明人 CHANG, KI HYUN;NAM, DONG HYUN
分类号 H01L21/677 主分类号 H01L21/677
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