发明名称 |
SILICON INGOT DRAWING DEVICE AND METHOD |
摘要 |
<p>PURPOSE: A silicon ingot drawing device and a method thereof are provided to reduce the height of a drawing out device for a silicon ingot by forming two drawing out device for a silicon ingot. CONSTITUTION: In a silicon ingot drawing device and a method thereof, a chamber(20) receives a silicon material flowing in within a cold crucible. A gas inlet(21) and a gas outlet(22) are arranged on one side of top and bottom of the chamber. A first drawing out device solidifies a silicon solution and draws out it. A moving unit moves the first drawing out device in horizontal direction. A second first drawing out device is moved to the side of the first drawing out device and draws out the silicon ingot.</p> |
申请公布号 |
KR20110067542(A) |
申请公布日期 |
2011.06.22 |
申请号 |
KR20090124176 |
申请日期 |
2009.12.14 |
申请人 |
KCC CORPORATION |
发明人 |
CHANG, KI HYUN;NAM, DONG HYUN |
分类号 |
H01L21/677 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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