| 摘要 |
In a method of manufacturing a piezoelectric element which includes a first electrode, a piezoelectric layer including a plurality of piezoelectric films, and a second electrode formed opposite a surface of the piezoelectric layer, a step of forming the first electrode metal layer includes forming the first electrode metal layer so as to include one or more iridium layer and permit the iridium layer to have the total thickness in the range from 2 to 5 nm to form the first electrode metal layer; and forming the first electrode film by heating the piezoelectric film at a temperature in the range from 400 to 650° C. for 30 minutes or more after the first piezoelectric film is formed in the step of forming the piezoelectric layer to oxidize the iridium contained in the first electrode metal layer.
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