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发明名称
LIMITED THERMAL BUDGET FORMATION OF PMD LAYERS
摘要
申请公布号
KR101042736(B1)
申请公布日期
2011.06.20
申请号
KR20067016385
申请日期
2005.01.10
申请人
发明人
分类号
H01L21/768;C23C16/40;C23C16/44;C23C16/455;C23C16/52;H01L21/316;H01L21/3205
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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