LASER THERMOELECTRIC TRANSFER METHOD, ORGANIC FILM PATTERNING METHOD USING IT, AND MANUFACTURING METHOD OF ORGANIC ELECTROLUMINESCENT DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a patterning method of an organic film capable of preventing stitching unevenness occurring between widths of laser beams due to limit of beam sizes of a laser.

SOLUTION: The laser thermoelectric transfer method includes a step of providing a substrate with a transfer film formed, a step of providing a base material film and a donor substrate containing a photothermal conversion layer on the base material film, a step of aligning the substrate and the donor substrate, and a step of irradiating a laser on a base material layer face of the donor substrate. In the step of irradiating the laser on the base material layer face, the laser is irradiated on the base material layer face of an area except that corresponding to a pattern to be formed on the substrate. The organic film patterning method and the manufacturing method of the organic electroluminescent display device use the laser thermoelectric transfer method.

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