CHARGED PARTICLE BEAM DEVICE AND PICTURE QUALITY IMPROVING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a technique for improving the contrast of a lower layer pattern in multiple layers by combining detection signals from a plurality of detectors by using a suitable distribution ratio corresponding to a pattern arrangement.

SOLUTION: In a charged particle beam device capable of improving picture quality by using detection images obtained from the plurality of detectors and a picture quality improving method for the charged particle beam device, a method for generating one or more output images by using detection images corresponding to outputs of respective detectors which are arranged in mutually different places is controlled by information such as a pattern direction or an edge strength calculated from design data and the detection images. Thus, a detection signal range can be expanded by using the plurality of detectors, and picture quality such as contrast can be improved by combining detection signals by using the pattern direction or the edge strength calculated from the design data and the detection images.

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