发明名称 Efficient High-Harmonic-Generation-Based EUV Source Driven by Short Wavelength Light
摘要 Extreme ultraviolet radiation is generated based on high-order harmonic generation. First, a driver pulse is generated from a drive laser. Second, the infrared driver pulse is passed through a second harmonic generator with an output wavelength in the range from 400 to 700 nm. Third, the pulse is then passed through a gas medium, which can be inside a resonant cavity, to generate a high-order harmonic in the form of extreme ultraviolet radiation.
申请公布号 US2011140009(A1) 申请公布日期 2011.06.16
申请号 US20100966574 申请日期 2010.12.13
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 KAERTNER FRANZ X.;FALCAO-FILHO EDILSON L.;LAI CHIEN-JEN;HONG KYUNG-HAN;FAN TSO YEE
分类号 H05G2/00 主分类号 H05G2/00
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