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发明名称
Evaporation source
摘要
申请公布号
US3153137(A)
申请公布日期
1964.10.13
申请号
US19610145016
申请日期
1961.10.13
申请人
UNION CARBIDE CORPORATION
发明人
DRUMHELLER CARL E.
分类号
B01D7/00;B01L7/02
主分类号
B01D7/00
代理机构
代理人
主权项
地址
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