| 摘要 |
PROBLEM TO BE SOLVED: To enable appropriate switchover of a batch processing system of calculating a physical quantity on the basis of the number of interference waveforms observed over a certain period and a sequential processing system of calculating the physical quantity on the basis of cycles of individual interference waveforms. SOLUTION: The physical quantity sensor includes a first operation part 9 which performs calculation of the physical quantity by the batch processing system, a second operation part 10 which performs calculation of the physical quantity by the sequential processing system, and a switching part 12 which calculates the number per a unit time of the interference waveforms from the cycles of the individual interference waveforms which a signal extracting part 8 measures. The switching part determines that the result of calculation of the second operation part 10 is to be adopted, when a frequency of a change in the number is set to fsig and a frequency of a carrier wave of oscillation wavelength modulation of a semiconductor laser 1 to fcar and when fsig>fcar/A(A is a prescribed constant larger than 1) is established, while it determines that the result of calculation of the first operation part 9 is to be adopted, when fsig>fcar/A is not established. COPYRIGHT: (C)2011,JPO&INPIT
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