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发明名称
Manufacturig method of floating gate layer for semiconductor device
摘要
申请公布号
KR101038398(B1)
申请公布日期
2011.06.01
申请号
KR20080047042
申请日期
2008.05.21
申请人
发明人
分类号
H01L21/8247;H01L27/115
主分类号
H01L21/8247
代理机构
代理人
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