| 摘要 |
PURPOSE: A wire saw apparatus is provided to prevent misrecognition of disconnection caused by a wafer that is partially damaged and contacts an insulation basket. CONSTITUTION: A wire saw apparatus comprises bobbins(20), a wire(30), an insulation basket(40), support panels(10), coupling members(50), and guide plates. The bobbins are arranged at an interval and rotated. The wire is wound around the bobbins to cut an ingot. The insulation basket is installed in the interval between the bobbins, under the ingot. The front and rear ends of the bobbins are connected to the support panels. The coupling members, which are made of an insulation material, are connected to the insulation basket and removably coupled to the support panels. The guide plates, which are made of an insulation material, are coupled to both sides of the insulation basket opposite to the bobbins. |
