| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic device attainable of a long life by maintaining outstanding gas barrier properties against flection. SOLUTION: A gas barrier film has, on a plastic film substrate, at least one gas barrier laminate which includes 3-5 repeated lamination of units each of which includes two layers i.e. an inorganic barrier layer and a polymer layer arranged mutually adjoining as a set. In the gas barrier film, at least one of the inorganic barrier layer includes two or more oxides of metal chosen from Si, Al, In, Sn, Zn, Ti, Cu, Ce, and Ta; the inorganic barrier layer including a plurality of kinds of metal oxide is formed by a plasma-assisted reactive sputtering system making the plurality of kinds of metal oxide targets and oxygen gas into raw materials; steam transmittance of the gas barrier film is 0.005 g/m<SP>2</SP>/day or lower at 38°C, 90% RH; and the gas barrier property is 0.004 g/m<SP>2</SP>/day or lower after 50 cycles of bending test at 25°C by IPC standard. COPYRIGHT: (C)2011,JPO&INPIT |
