发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR FOR TRANSISTOR AND METHOD OF MANUFACTURING THE TRANSISTOR
摘要 A method of manufacturing a semiconductor for a transistor that includes forming a precursor layer by coating a surface of an insulation substrate with a precursor solution for an oxide semiconductor, forming an oxide semiconductor by oxidizing a portion of the precursor layer, and removing a remaining precursor layer except for the oxide semiconductor.
申请公布号 US2011124152(A1) 申请公布日期 2011.05.26
申请号 US20100829977 申请日期 2010.07.02
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 AHN BO-KYOUNG;JANG SEON-PIL;JO GUG-RAE;YOO HONG-SUK;KIM CHANG-HOON;KIM MIN-UK;BAE JU-HAN
分类号 H01L21/36 主分类号 H01L21/36
代理机构 代理人
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