发明名称 |
Transport system for holding and transporting flexible substrates |
摘要 |
<p>The foil/film has substrates fixed temporarily on a transport foil/film by flexible cement where the transport foil/film is drivable by a driving unit for transport of the substrates. The transport foil/film is made as an endless belt and formed from a plastic and/or fiber material. The transport foil/film is wound onto a transport roll. The substrates are formed from a material of a group of semiconductors or connecting semiconductors and from one of the materials such as glass, silicon, gallium arsenide, indium phosphide and ceramic. An independent claim is also included for a method for accommodating and transporting a thin, flexible substrate along a transport distance of a transport system.</p> |
申请公布号 |
EP2325121(A1) |
申请公布日期 |
2011.05.25 |
申请号 |
EP20090014401 |
申请日期 |
2009.11.18 |
申请人 |
EV GROUP E. THALLNER GMBH |
发明人 |
LINDNER, PAUL;GLINSNER, THOMAS;KREINDL, GERALD |
分类号 |
B65H37/00 |
主分类号 |
B65H37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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