发明名称 Optical measuring apparatus, optical measuring method, and optical measurement processing program
摘要 An optical measuring apparatus includes a light transmission unit, a light reception unit, a measurement value calculation unit, and a correction unit. The light transmission unit forms a beam of light that focuses in a measurement area where a measurement target object is placed and scans the measurement area with the beam of light. The light reception unit receives the beam of light that has passed through the measurement area and outputs a received-light signal on the basis of the received beam of light. The measurement value calculation unit calculates a measurement value that represents the dimension of the measurement target object on the basis of the received-light signal. The correction unit corrects the measurement value on the basis of the amount of change in the strength of the received-light signal per unit of time of scanning the beam of light.
申请公布号 US7948642(B2) 申请公布日期 2011.05.24
申请号 US20100759159 申请日期 2010.04.13
申请人 MITUTOYO CORPORATION 发明人 KATAOKA MASANOBU
分类号 G01B11/14 主分类号 G01B11/14
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