| 发明名称 |
TEST CHIPLETS FOR DEVICES |
| 摘要 |
A method of forming a device is disclosed. The method includes providing a substrate on which the device is formed. It also includes forming a test cell on the substrate. The test cell includes a defect programmed into the cell to facilitate defect detection.
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| 申请公布号 |
US2011114949(A1) |
申请公布日期 |
2011.05.19 |
| 申请号 |
US20090621513 |
申请日期 |
2009.11.19 |
| 申请人 |
CHARTERED SEMICONDUCTOR MANUFACTURING, LTD. |
发明人 |
LIM VICTOR SENG KEONG;WAI RACHEL YIE FANG;GN FANG HONG;HSIA LIANG CHOO |
| 分类号 |
H01L23/544;G06F17/50;H01L21/66 |
主分类号 |
H01L23/544 |
| 代理机构 |
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