FILTER BOX, LIGHT EXPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

摘要

The filter box for holding a chemical filter is provided. The filter box comprises a box-shaped frame for holding the chemical filter with a guide groove formed in the side face of the frame. The guide groove is placed between the upper end and the lower end of the side face of the frame, and has a first groove portion communicating with the side edge of the side surface of the frame and a second groove portion communicating with the first groove portion and extending toward the upper end of the frame. The guide groove enables efficient exchange of the filter with a high positioning precision.