| 摘要 |
PROBLEM TO BE SOLVED: To set a large deflection angle at a mirror part. SOLUTION: A light deflection element 12A is provided including: a pair of first arm parts 12e, 12e each having a first end part which is fixed and supported and a second end part which is a free end and has a narrower width or a thinner thickness than the first end part; a pair of second arm parts 12e, 12e each having a third end part which is fixed and supported and a fourth end part which is a free end and has a narrower width or a thinner thickness than the third end part and being arranged oppositely to the pair of first arm parts; the mirror part 12i which is arranged between the second end part of the pair of first arm parts and the fourth end part of the pair of second arm parts and reflects light emitted from outside; a pair of first torsion spring parts 12g, 12g each connecting the second end part of the pair of first arm parts and the mirror part; and a pair of second torsion spring parts 12h, 12h each connecting the fourth end part of the pair of second arm parts and the mirror part and being arranged oppositely to the pair of first torsion spring parts. COPYRIGHT: (C)2011,JPO&INPIT |
