| 摘要 |
PROBLEM TO BE SOLVED: To secure measuring precision capable of guaranteeing shape precision required for a base material of precision components processed through etching with measured values having dispersion. SOLUTION: A method for measuring the optical shape of a plate material for arranging rod-like light sources upward of rod-like light source arrangement of a regular interval, in a range of plate material shape measurement and a phase change measurement plate material, and measuring the shape of the plate material, based on an image photographing a mirror image of the rod-like light sources observed on a plate material surface with a camera, includes arranging a plurality of the rod-like light sources at the regular interval over the measurement range of the plate material shape; obtaining cyclic brightness distribution waveform of a vertical direction in an arrangement direction of the rod-like light sources on the image photographed with the camera; and measuring the optical shape of the plate material, by measuring the change in the phase amount for the cyclic luminance distribution waveform, in measuring a flat reference plane and obtaining the angular distribution of the plate material surface. COPYRIGHT: (C)2011,JPO&INPIT |
