发明名称 GENERATOR FOR FOAM TO CLEAN SUBSTRATE
摘要 In an example embodiment, a device for generating a cleaning foam includes a female housing and a male plug. The plug includes an aperture into which a fluid flows from another component of the cleaning system. The plug includes a premix chamber which receives the fluid from the aperture and into which a gas is injected to form a foam. In an example embodiment, the chamber is a hollow cylinder and the gas is injected into the cylinder through channels which are tangential to the cylinder. The plug also includes a solid cylinder with a continuous helical indentation on the outside of the solid cylinder. When the male plug is inserted into the female housing, the continuous helical indentation and the inner surface of the housing form a helical channel through which the foam flows and is further mixed on its way back into the cleaning system.
申请公布号 KR20110052598(A) 申请公布日期 2011.05.18
申请号 KR20117002774 申请日期 2009.08.03
申请人 LAM RESEARCH CORPORATION 发明人 KHOLODENKO ARNOLD;HUSAIN ANWAR;TOMASCH GREGORY A.;LIN CHENG YU (SEAN)
分类号 B08B3/00;H01L21/304 主分类号 B08B3/00
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