| 摘要 |
PURPOSE: A burn-in tester for testing a semiconductor is provided to control the rotation angle of a damper by controlling the opening area of an inlet and outlet area in proportion to the difference between an inner temperature and a set temperature. CONSTITUTION: A chamber(120) comprises a burn-in room(121), a circulation path(122), an outlet(124), a vent(124), a heater(126), and a damper. The burn-in room comprises an inlet hole and an outlet hole. The circulation path is arranged outside the burn-in room and connects the inlet hole to the outlet hole. The vent is interposed between the inlet hole and the outlet hole. The damper is arranged between the inlet hole and the outlet hole and is rotatable to control the opening area of the inlet hole and the outlet hole. A controller controls the rotation angle of the damper to maintain the internal temperature of the burin-in room. |
