发明名称 MEASURING ELEMENT FOR VIBRATIONAL TYPE GYROSCOPES
摘要 <P>PROBLEM TO BE SOLVED: To provide a measuring element for vibrational type gyroscopes which reduces zero-point temperature drift through contribution of electrostatic coupling in wiring for detection vibrational arms on the base of a vibrator. <P>SOLUTION: The measuring element for vibrational type gyroscopes includes a Y-axis detection side signal electrode 30 installed in a Y-axis detection vibrational arm, a Y-axis detection side ground electrode 31 installed in the Y-axis detection vibrational arm, a Z-axis detection side signal electrode installed in a Z-axis detection vibrational arm, a Z-axis detection side ground electrode installed in the Z-axis detection vibrational arm, a Y-axis detection side signal wiring 40E formed on the base associated with the Y-axis detection side signal electrode, a Y-axis detection side ground wiring formed on the base associated with the Y-axis detection side ground electrode, a Z-axis detection side signal wiring 42E formed on the base associated with the Z-axis detection side signal electrode, and a Z-axis detection side ground wiring 43E formed on the base associated with the Z-axis detection side ground electrode. The Y-axis detection side ground wiring and the Z-axis detection side ground wiring is standardized. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011095270(A) 申请公布日期 2011.05.12
申请号 JP20100289670 申请日期 2010.12.27
申请人 SEIKO EPSON CORP 发明人 OI TOMOYOSHI;GOJI SHOSAKU;KIKUCHI TAKAYUKI;OSUGI YUKIHISA
分类号 G01C19/5607;G01C19/5621;H01L41/08;H01L41/18;H01L41/187;H01L41/22;H01L41/29 主分类号 G01C19/5607
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