| 发明名称 |
BILAYER SYSTEMS INCLUDING A POLYDIMETHYLGLUTARIMIDE-BASED BOTTOM LAYER AND COMPOSITIONS THEREOF |
| 摘要 |
Bilayer systems include a bottom layer formed of polydimethylglutarimide, an acid labile dissolution inhibitor and a photoacid generator. The bilayer system can be exposed and developed in a single exposure and development process.
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| 申请公布号 |
US2011111339(A1) |
申请公布日期 |
2011.05.12 |
| 申请号 |
US20090613800 |
申请日期 |
2009.11.06 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
CHENG JOY;KIM HO-CHEOL;ITO HIROSHI;ITO ATSUKO;TRUONG HOA D. |
| 分类号 |
G03F7/004;G03F7/20 |
主分类号 |
G03F7/004 |
| 代理机构 |
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代理人 |
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