发明名称 LIGHTING OPTICAL SYSTEM, LIGHTING METHOD AND DETECTION APPARATUS
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a lighting optical system capable of reducing speckle noise and suppressing light amount loss. <P>SOLUTION: The lighting optical system 20 includes: a lens array 21 in which at least either of a plurality of concave surfaces and convex surfaces respectively having diameters smaller than the diameter of incident laser beam are irregularly arrayed and the laser beam is diffused; and a driving part 22 which rotates the lens array 21. It is preferable that the lens array 21 has only the concave surfaces. <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011095642(A) 申请公布日期 2011.05.12
申请号 JP20090251726 申请日期 2009.11.02
申请人 LASERTEC CORP 发明人 TAKEHISA KIWAMU;KUSUSE HARUHIKO
分类号 G02B5/02;G03F1/84;H01L21/027 主分类号 G02B5/02
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