发明名称 |
LIGHTING OPTICAL SYSTEM, LIGHTING METHOD AND DETECTION APPARATUS |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lighting optical system capable of reducing speckle noise and suppressing light amount loss. <P>SOLUTION: The lighting optical system 20 includes: a lens array 21 in which at least either of a plurality of concave surfaces and convex surfaces respectively having diameters smaller than the diameter of incident laser beam are irregularly arrayed and the laser beam is diffused; and a driving part 22 which rotates the lens array 21. It is preferable that the lens array 21 has only the concave surfaces. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
申请公布号 |
JP2011095642(A) |
申请公布日期 |
2011.05.12 |
申请号 |
JP20090251726 |
申请日期 |
2009.11.02 |
申请人 |
LASERTEC CORP |
发明人 |
TAKEHISA KIWAMU;KUSUSE HARUHIKO |
分类号 |
G02B5/02;G03F1/84;H01L21/027 |
主分类号 |
G02B5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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