| 发明名称 |
MICRO-ELECTRO-MECHANICAL-SYSTEM DEVICE WITH PARTICLES BLOCKING FUNCTION AND METHOD FOR MAKING SAME |
| 摘要 |
The present invention discloses a MEMS device with particles blocking function, and a method for making the MEMS device. The MEMS device comprises: a substrate on which is formed a MEMS device region; and a particles blocking layer deposited on the substrate.
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| 申请公布号 |
US2011108934(A1) |
申请公布日期 |
2011.05.12 |
| 申请号 |
US201113009270 |
申请日期 |
2011.01.19 |
| 申请人 |
PIXART IMAGING INCORPORATION, R.O.C. |
发明人 |
WANG CHUAN WEI;LEE SHENG TA |
| 分类号 |
H01L29/84;H01L21/302 |
主分类号 |
H01L29/84 |
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