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发明名称
METHOD FOR MANUFACTURING ISOLATION FILM OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR101033983(B1)
申请公布日期
2011.05.11
申请号
KR20040033572
申请日期
2004.05.12
申请人
发明人
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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