发明名称 |
Dielectric film structure, piezoelectric actuator using dielectric element film structure and ink jet head |
摘要 |
The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2: u=(Cc/Ca)×(Wa/Wc)  (1) where, Cc is a count number of a peak of a (001′) face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, 1′ is a natural number selected so that Cc becomes maximum); Ca is a count number of a peak of a (h′00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h′ is a natural number selected so that Cc becomes maximum); Wc is a half-value width of a peak of the (001′) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wa is a half-value width of a peak of the (h′00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement. |
申请公布号 |
US7938515(B2) |
申请公布日期 |
2011.05.10 |
申请号 |
US20090389710 |
申请日期 |
2009.02.20 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
AOTO HIROSHI;TAKEDA KENICHI;FUKUI TETSURO;IFUKU TOSHIHIRO |
分类号 |
B41J2/045;B41J2/055;B41J2/14;H01B3/12;H01L29/00;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/22 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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