| 摘要 |
PROBLEM TO BE SOLVED: To provide a template suppressing defect of a transfer layer, and a pattern forming method. SOLUTION: The template having irregularities 12 formed on a first main face (transfer face 11a) is provided. The transfer face is brought into contact with a transfer material 30 set on the main face 20a of a substrate 20 to be treated, and the irregular patterns of the transfer face are transferred to the transfer material by the contact of the transfer face with the transfer material. Side walls 12s of the irregularities have grooves 13b formed along the depth direction (X-axis direction) of the irregularities. COPYRIGHT: (C)2011,JPO&INPIT |
