发明名称 MAGNETIC SENSOR STACK BODY, METHOD OF FORMING THE SAME, FILM FORMATION CONTROL PROGRAM, AND RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To align crystal c-axes in magnetic layers near two opposed junction wall faces of a magneto-resistive element so as to be almost perpendicular to the junction wall faces. SOLUTION: The magnetic sensor stack body 1 has, on a substrate 31, a magnetoresistive element 10 whose electric resistance fluctuates when a bias magnetic field is applied and, on sides of opposed junction wall faces 10a, 10b of the magneto-resistive element 10, field regions 22 including magnetic layers 22a, 22b for applying the bias magnetic field to the element 10. The magnetoresistive element 10 has at least a ferromagnetic stack 18 on a part of an antiferromagnetic layer 13, and a width W<SB>F</SB>of an uppermost face of the ferromagnetic stack 18 along a direction in which the junction wall faces 10a, 10b are opposed to each other is formed smaller than a width W<SB>A</SB>of an uppermost face of the anti-ferromagnetic layer 13 along the same direction. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011090759(A) 申请公布日期 2011.05.06
申请号 JP20100149407 申请日期 2010.06.30
申请人 CANON ANELVA CORP 发明人 ABARA EINSTEIN NOEL;SUENAGA MASAHIRO;OTA YOSHINORI;ENDO TETSUYA
分类号 G11B5/39;G01R33/09;H01F10/32;H01F41/18;H01F41/34;H01L43/08;H01L43/12 主分类号 G11B5/39
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