发明名称 Transfortation device for substrate
摘要 <p>PURPOSE: A substrate transferring device is provided to transfer a substrate using a proper guide roller and an upper roller according to the size of a substrate, thereby easily transferring substrates of different standards. CONSTITUTION: A transfer axis(10) transfers a first substrate or a second substrate whose standards are different from the standards of the first substrate. A fixing guide roller(20) supports a side of the first substrate. A movable guide roller(31) supports a side of the second substrate smaller than the first substrate when the movable guide roller is elevated. An elevation driving unit(40) elevates the movable guide roller. An upper fixing roller(50) supports an edge of the first substrate transferred by the transfer axis.</p>
申请公布号 KR20110045973(A) 申请公布日期 2011.05.04
申请号 KR20090102753 申请日期 2009.10.28
申请人 发明人
分类号 H01L21/677;B65G49/06;G02F1/13 主分类号 H01L21/677
代理机构 代理人
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