| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating material removing device for removing a coating material from an end face of a substrate after forming the coating material on the substrate. SOLUTION: The coating material removing device includes a holding mechanism 1 holding a substrate 2 on which a coating material is formed, a removing member 4 having a wetted surface 4b opposite to a coating material removal region 2a of the substrate 2 held by the holding mechanism, and a liquid supplying mechanism supplying a cleaning liquid or an etchant to a gap 4c between the wetted surface 4b and the coating material removal region 2a of the substrate 2. The gap 4c is a gap for causing capillary action, and is filled up owing to the capillary action, with the cleaning liquid or the etchant supplied by the liquid supplying mechanism. COPYRIGHT: (C)2011,JPO&INPIT |
