| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas-dissolved water manufacturing apparatus capable of preventing flowing in and the like into a gas flow control device by removing condensed water generated in a gas supplying piping after a long term stopping. SOLUTION: When ultrapure water flows into an electrolytic device 3, hydrogen gas is generated by an electrolysis of water. This hydrogen gas is lead toward a gas dissolving membrane module 2 via a dehumidifying membrane 9, a gas filter 11 and an MFC 10. This hydrogen gas flows into a gas phase chamber 2c, goes into a liquid phase chamber 2b by passing a gas permeating membrane 2a, dissolves into ultrapure water here and hydrogen-dissolved water is obtained. When the gas-dissolved water manufacturing apparatus is stopped for a long time, condensed water is stored in the gas supplying piping 8 between the electrolytic device 3 and the dehumidifying membrane 9; therefore, the condensed water moves inside the gas supplying piping 8 toward the gas dissolving membrane module 2 when the gas-dissolved water manufacturing device is started up again. However, as the condensed water is removed by the gas filter 11, it does not reach the MFC 10 gas flow control device. COPYRIGHT: (C)2011,JPO&INPIT |
