发明名称 Sinusoidal phase shifting interferometry
摘要 Disclosed is a method that includes combining a first light beam and at least a second light beam to form a combined light beam, introducing a sinusoidal phase shift with a frequency f between a phase of the first light beam and a phase of the second light beam, recording at least one interference signal based on a modulation of the combined light beam in response to the sinusoidal phase shift, where the interference signal includes at least three different frequency components, and outputting the information. For each interference signal, information related to the difference in optical path lengths of the first and second light beam is determined by comparing the intensity of the at least three different frequency components of the interference signal.
申请公布号 US7933025(B2) 申请公布日期 2011.04.26
申请号 US20070958175 申请日期 2007.12.17
申请人 ZYGO CORPORATION 发明人 DE GROOT PETER
分类号 G01B9/02 主分类号 G01B9/02
代理机构 代理人
主权项
地址