| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for forming a metal oxide film having predetermined patterns, with less variation of surface resistivity, light transmittance, etc., and to provide such the metal oxide film. <P>SOLUTION: This method for forming a metal oxide film with predetermined patterns on a substrate comprises: a first step of applying a liquid form matter containing a metal salt on the substrate and forming a metal salt film; a second step of providing predetermined patterns to the metal salt film; and a third step of subjecting the metal salt film to thermal oxidation treatment or predetermined plasma oxidation treatment to convert it into a metal oxide film. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
