发明名称 METHODS FOR CLEANING SUBSTRATES
摘要 A method for removing sand particles from a substrate is described. The method includes the step of treating the substrate with an acid solution comprising HxAF6, wherein A is selected from the group consisting of Si, Ge, Ti, Zr, Al, and Ga; and wherein HxAF6 is present at a concentration in the range from about 5 weight percent to about 40 weight percent.
申请公布号 US2011088720(A1) 申请公布日期 2011.04.21
申请号 US20090582347 申请日期 2009.10.20
申请人 GENERAL ELECTRIC COMPANY 发明人 VARANASI KRIPA KIRAN;KOOL LAWRENCE BERNARD;OFORI-OKAI GABRIEL KWADWO
分类号 C23G1/02 主分类号 C23G1/02
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