| 摘要 |
The invention relates to a device for interferometric vibration measurement on an object 8, comprising a radiation source 1 (eg laser) for generating an original beam, a first beam splitter 3 for dividing the original beam into a measuring beam and a reference beam 4, 5, a detector 10 and a focussing device 9. The measuring beam is at least partly reflected by the object, and the reflected beam and the reference beam are superimposed on a detection area of the detector. A focussing device is arranged in the beam path of the measuring beam for focussing the measuring beam onto a measuring point 7 on the object. A measuring beam having a wavelength greater than 1100 nm can be generated and the device additionally comprises an image unit 12 for the two-dimensional imaging of at least a sub-region of the object surrounding the measuring point. The focussing device is arranged in the beam path between image unit and object. The focus of the measuring beam lies approximately in the focal plane of the image unit and, by means of the focussing device, the focal point of the measuring beam and the focal plane of the imaging unit are displaceable simultaneously. The invention relates also to a method for interferometric vibration measurement on an object using the device according to the invention. |
