FABRICATION METHOD OF FIELD EMISSION DEVICES USING NANO-BEADS

摘要

PURPOSE: A fabrication method of field emission devices using nano-beads are provided to fabricate highly dense and high output device by forming plural silicon tips at one opening unit. CONSTITUTION: An insulating film(11) is formed on an upper portion of a substrate, and a gate metal film(21) including an opening unit is formed on the upper portion of the insulating film. A substrate is exposed to the outside through an opening unit(22) by etching the insulating film. A nano-bead(31) is formed on the upper portion after etching the insulation film. A tip is formed inside the opening unit by etching the substrate through the use of a mask.