POWER SUPPLY DEVICE FOR SPUTTERING AND SPUTTERING DEVICE USING THE SAME,申请号EP19980904390-传众专利搜索

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发明名称	POWER SUPPLY DEVICE FOR SPUTTERING AND SPUTTERING DEVICE USING THE SAME
摘要
申请公布号	EP0989202(B1)	申请公布日期	2011.04.20
申请号	EP19980904390	申请日期	1998.02.19
申请人	SHIBAURA MECHATRONICS CORPORATION	发明人	KURIYAMA, NOBORU;YATSU, YUTAKA;UTSUNOMIYA, NOBUAKI;YASUMOTO, YUJI
分类号	C23C14/34;C23C14/54;H01J37/34;H01L21/203;H01L21/285	主分类号	C23C14/34
代理机构		代理人
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