| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus and method, capable of easily resolving a pseudo contact and detecting fine defects such as cracks and so on by an electric inspection. SOLUTION: The inspection apparatus inspects a conductive state between an inspection object substrate 6 having an electronic component 10 mounted on a mounting surface thereon and the electronic component 10. The apparatus includes a holding means 8 for holding the inspection object, heat treatment means 3 and 4 for selectively heating or cooling the electronic component 10 so that the electronic component 10 is warped by a temperature gradient, and an inspection means 1 for inspecting the conductive state between the electronic component 10 and the substrate 6 with the electronic component 10 being warped. COPYRIGHT: (C)2011,JPO&INPIT |
