| 摘要 |
A photovoltaic device and method of forming a photovoltaic device. The photovoltaic device includes a fluorine-containing photovoltaic material and a transparent electrode. Inclusion of fluorine in the photovoltaic material increases its thermal stability. The effect is particularly pronounced in photovoltaic materials based on disordered forms of silicon, including amorphous, nanocrystalline, or microcrystalline silicon. The higher thermal stability permits deposition or annealing of the transparent electrode at high temperature. As a result, high conductivity is achieved for the transparent electrode without degrading the photovoltaic material. The higher conductivity of the transparent electrode facilitates series integration of individual devices to form a module. The method includes forming a photovoltaic material from a fluorinated precursor or treating a photovoltaic material in a fluorine-containing ambient.
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