发明名称 |
EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEAD ELECTRODE ASSEMBLY |
摘要 |
An inner electrode of a showerhead electrode assembly useful for plasma etching includes features providing improved positioning accuracy and reduced warping, which leads to enhanced uniformity of plasma processing rate. The assembly can include a thermal gasket set and fasteners such as bolts or cam locks located on a radius of ¼ to ½ the radius of the inner electrode. A method of assembling the inner electrode and gasket set to a supporting member is also provided.
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申请公布号 |
US2011083809(A1) |
申请公布日期 |
2011.04.14 |
申请号 |
US20100903412 |
申请日期 |
2010.10.13 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
DE LA LLERA ANTHONY;MANKIDY PRATIK |
分类号 |
H01L21/465;F16J15/02;H01R43/00 |
主分类号 |
H01L21/465 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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