发明名称 Non-volatile memory device and manufacturing method thereof
摘要 A non-volatile memory device having a Polysilicon Oxide Nitride Oxide Semiconductor (SONOS) structure in which a charge trap layer is separated physically in a horizontal direction, and a method of manufacturing the same. The charge trap layer that traps electric charges toward the source and the drain is physically divided. It can fundamentally prevent the charges at both sides from being moved mutually. It is therefore possible to prevent interference between charges at both sides although the cell size is reduced.
申请公布号 US7923335(B2) 申请公布日期 2011.04.12
申请号 US20080276210 申请日期 2008.11.21
申请人 HYNIX SEMICONDUCTOR INC. 发明人 CHOI EUN SEOK
分类号 H01L21/336;H01L21/8238 主分类号 H01L21/336
代理机构 代理人
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