发明名称 |
Method of measuring length of measurement object article in micro-structure |
摘要 |
A substrate comprises a substrate main body having a surface on which a measurement object article is to be formed. A reference scale is disposed on the surface of the substrate main body in the vicinity of a region of the surface where the measurement object article is to be formed. The reference scale has adjacent graduations spaced-apart a preselected distance from one another.
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申请公布号 |
US7923267(B2) |
申请公布日期 |
2011.04.12 |
申请号 |
US20060346826 |
申请日期 |
2006.02.03 |
申请人 |
SII NANOTECHNOLOGY INC. |
发明人 |
MUNEKANE MASANAO;TASHIRO JUNICHI |
分类号 |
G01R31/26 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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