ACTIVE REMOVABLE CHUCK

摘要

PURPOSE: An active removable chuck is provided to actively control an adhesive force, thereby shortening transfer time and process time. CONSTITUTION: A device(30) is formed and transferred on and by a transfer substrate(20a). A chuck(10) is positioned on the device. Power is applied to the chuck. If power is applied in the direction in which the fiber of the chuck is aligned, the adhesive force between the chuck and the device increases. The device is transferred to a target substrate(20b) while the device is attached to the chuck. The device is attached/detached by changing the direction of power applied to the chuck.