发明名称 SEMICONDUCTOR, SEMICONDUCTOR ELEMENT, METHOD OF MANUFACTURING SEMICONDUCTOR, AND METHOD OF MANUFACTURING SEMICONDUCTOR ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor with a low-resistance semiconductor crystal formed on a nonpolar surface. <P>SOLUTION: The semiconductor includes a substrate 101, and p-type layers 108 and 109 laminated on a principal surface of the substrate 101, wherein the substrate principal surface is nonpolar, the p-type layers 108 and 109 are each formed of at least one of a group-III nitride semiconductor and a group-II oxide semiconductor, and each upper surface of the p-type layers 108 and 109 includes a facet plane having a plane direction different from that of the substrate principal surface. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011071200(A) 申请公布日期 2011.04.07
申请号 JP20090219114 申请日期 2009.09.24
申请人 NEC CORP 发明人 NANBAE KOICHI;MATSUDATE MITSUKI;OYA MASATERU;SHIBA KAZUHIRO
分类号 H01S5/042;H01L21/205;H01L33/20 主分类号 H01S5/042
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