| 摘要 |
<p>The disclosed linear motor, wherein stationary elements are disposed in a dispersed manner, performs position control of a mobile element while driving the mobile element smoothly and preventing unnecessary speed fluctuations. A drive device calculates the deviation between a position command from a control device and a position detected by means of the position sensor of the corresponding stationary element, performs position control wherein a speed command that is used in speed control of the mobile element is calculated on the basis of said deviation and a position gain, and of the range wherein position is detected by means of the position sensor of the corresponding stationary element, when the mobile element enters a control range wherein at least one portion of the magnet of a magnet section faces the coil of said stationary element, the deviation is back calculated wherein the speed of motion of the mobile element is taken as the speed command, the position of the mobile element is back calculated from said deviation and a position command, and taking the calculated position as the position of the mobile element when the mobile element entered the control range, position control is performed correcting the position detected by the position sensor.</p> |
